L/S ≤ 5/5μm Line Embedded Organic Substrate Manufacturing for 2.1D/2.5D SiP Application

Chen, Yu-Hua, Shyh-Lian Cheng, Dyi-Chung Hu, and Tzvy-Jang Tseng. 2015. “L/S ≤ 5/5μm Line Embedded Organic Substrate Manufacturing for 2.1D/2.5D SiP Application.” IMAPSource Proceedings 2015 (1): 874–78. https:/​/​doi.org/​10.4071/​isom-2015-THP53.