Vol. 2011, Issue 1, 2011January 01, 2011 EDT
Analysis and Control of Interface Reactions in Microelectronic Systems
Analysis and Control of Interface Reactions in Microelectronic Systems
Perepezko, J.H., S.D. Imhoff, and R. Sakidja. 2011. “Analysis and Control of Interface Reactions in Microelectronic Systems.” IMAPSource Proceedings 2011 (1): 264–74. https://doi.org/10.4071/isom-2011-TP2-Paper6.