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Symposium Proceedings
Vol. 2019, Issue 1, 2019October 01, 2019 EDT

How to secure the fabrication of Gallium Nitride on Si wafers

D. Alliata, N. Anderson, M. Durand de Gevigney, I. Bergoend, P. Gastaldo,
Confocal Chromatic Inspection Defectivity Gallium Nitride Phase Shift Deflectometry Light Scattering Process Control
• https://doi.org/10.4071/2380-4505-2019.1.000444
IMAPSource Conference Papers
Alliata, D., N. Anderson, M. Durand de Gevigney, I. Bergoend, and P. Gastaldo. 2019. “How to Secure the Fabrication of Gallium Nitride on Si Wafers.” IMAPSource Proceedings 2019 (1): 444–49. https://doi.org/10.4071/2380-4505-2019.1.000444.
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