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Symposium Proceedings
Vol. 2019, Issue 1, 2019
October 01, 2019 EDT
How to secure the fabrication of Gallium Nitride on Si wafers
D. Alliata
,
N. Anderson
,
M. Durand de Gevigney
,
I. Bergoend
,
P. Gastaldo
,
Confocal Chromatic Inspection
Defectivity
Gallium Nitride
Phase Shift Deflectometry
Light Scattering
Process Control
•
https://doi.org/10.4071/2380-4505-2019.1.000444
IMAPSource Conference Papers
Alliata, D., N. Anderson, M. Durand de Gevigney, I. Bergoend, and P. Gastaldo. 2019. “How to Secure the Fabrication of Gallium Nitride on Si Wafers.”
IMAPSource Proceedings
2019 (1): 444–49.
https://doi.org/10.4071/2380-4505-2019.1.000444
.
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