Vol. 2014, Issue 1, 2014January 01, 2014 EDT
Optical Characterization and Defect inspection for 3D stacked IC technology
Optical Characterization and Defect inspection for 3D stacked IC technology
Fresquet, Gilles, and Jean-Philippe Piel. 2014. “Optical Characterization and Defect Inspection for 3D Stacked IC Technology.” IMAPSource Proceedings 2014 (1): 630–34. https://doi.org/10.4071/isom-WP17.