Obata, Susumu, Mitsuo Sano, Kazuo Shimokawa, and Kazuhito Higuchi. 2019. “A Novel Fabrication Process for High Density Silicon Capacitors by Using Metal-Assisted Chemical Etching.” IMAPSource Proceedings 2019 (1): 248–53. https://doi.org/10.4071/2380-4505-2019.1.000248.