Vol. 2012, Issue 1, 2012January 01, 2012 EDT
Glass Wafers as Support Carriers for Wafer Thinning Processes
Glass Wafers as Support Carriers for Wafer Thinning Processes
Shorey, Aric, John Keech, and Windsor Thomas. 2012. “Glass Wafers as Support Carriers for Wafer Thinning Processes.” IMAPSource Proceedings 2012 (1): 760–64. https://doi.org/10.4071/isom-2012-WP11.