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Symposium Proceedings
Vol. 2015, Issue 1, 2015October 01, 2015 EDT

Tunable High-Q TSV Inductor Packaging with MEMS

Bruce Kim, Saikat Mondal, Sang-Bock Cho,
TSVinductorMEMStunable inductor3D inductor
https://doi.org/10.4071/isom-2015-TP26
IMAPSource Conference Papers
Kim, Bruce, Saikat Mondal, and Sang-Bock Cho. 2015. “Tunable High-Q TSV Inductor Packaging with MEMS.” IMAPSource Proceedings 2015 (1): 62–66. https:/​/​doi.org/​10.4071/​isom-2015-TP26.
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