Vol. 2012, Issue 1, 2012January 01, 2012 EDT
A Novel OPC Technique for 2D Critical Dimension Optimization of Sub-micron Patterns using an Experimental Methodology
A Novel OPC Technique for 2D Critical Dimension Optimization of Sub-micron Patterns using an Experimental Methodology
Pak, Murat, Zeliha Yilmaz, and Aylin Ersoy. 2012. “A Novel OPC Technique for 2D Critical Dimension Optimization of Sub-Micron Patterns Using an Experimental Methodology.” IMAPSource Proceedings 2012 (1): 702–9. https://doi.org/10.4071/isom-2012-WA56.