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Symposium Proceedings
Vol. 2016, Issue 1, 2016October 01, 2016 EDT

Smart in-line defectivity/metrology process control solution for advanced 3D integration

Amina Sidhoum, Nicolas Devanciard, Franck Bana, Arnaud Garnier, Nicolas Bresson, Sandra Bos, Stéphane Rey, Carlos Beitia, Dario Alliata, Darcy Hart, John Thornell, Justin Miller, Gilles Vera, Scott Balak,
Advanced MetrologyDefectivityProcess Control3D integrationMicro-bump/pillarInterferometry
https://doi.org/10.4071/isom-2016-TP21
IMAPSource Conference Papers
Sidhoum, Amina, Nicolas Devanciard, Franck Bana, Arnaud Garnier, Nicolas Bresson, Sandra Bos, Stéphane Rey, et al. 2016. “Smart In-Line Defectivity/Metrology Process Control Solution for Advanced 3D Integration.” IMAPSource Proceedings 2016 (1): 32–37. https:/​/​doi.org/​10.4071/​isom-2016-TP21.
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