Smart in-line defectivity/metrology process control solution for advanced 3D integration

Amina Sidhoum; Nicolas Devanciard; Franck Bana; Arnaud Garnier; Nicolas Bresson; Sandra Bos; Stéphane Rey; Carlos Beitia; Dario Alliata; Darcy Hart; John Thornell; Justin Miller; Gilles Vera; Scott Balak

doi:10.4071/isom-2016-TP21

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Sidhoum, Amina, Nicolas Devanciard, Franck Bana, Arnaud Garnier, Nicolas Bresson, Sandra Bos, Stéphane Rey, et al. 2016. “Smart In-Line Defectivity/Metrology Process Control Solution for Advanced 3D Integration.” IMAPSource Proceedings 2016 (1): 32–37. https://doi.org/10.4071/isom-2016-TP21.

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