Spin Coating of Dielectrics on Thin Silicon To Enhance Strength Characteristics

Haring, Fred, Syed Sajid Ahmad, Nathan Schneck, Kaycie Gerstner, Nicole Dallman, Chris Hoffarth, and Aaron Reinholz. 2010. “Spin Coating of Dielectrics on Thin Silicon To Enhance Strength Characteristics.” IMAPSource Proceedings 2010 (1): 339–43. https:/​/​doi.org/​10.4071/​isom-2010-TP5-Paper3.