Haring, Fred, Syed Sajid Ahmad, Nathan Schneck, Kaycie Gerstner, Nicole Dallman, Chris Hoffarth, and Aaron Reinholz. 2010. “Spin Coating of Dielectrics on Thin Silicon To Enhance Strength Characteristics.” IMAPSource Proceedings 2010 (1): 339–43. https://doi.org/10.4071/isom-2010-TP5-Paper3.