Spin Coating of Dielectrics on Thin Silicon To Enhance Strength Characteristics

Fred Haring; Syed Sajid Ahmad; Nathan Schneck; Kaycie Gerstner; Nicole Dallman; Chris Hoffarth; Aaron Reinholz

doi:10.4071/isom-2010-TP5-Paper3

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Haring, Fred, Syed Sajid Ahmad, Nathan Schneck, Kaycie Gerstner, Nicole Dallman, Chris Hoffarth, and Aaron Reinholz. 2010. “Spin Coating of Dielectrics on Thin Silicon To Enhance Strength Characteristics.” IMAPSource Proceedings 2010 (1): 339–43. https://doi.org/10.4071/isom-2010-TP5-Paper3.

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