Vol. 2014, Issue 1, 2014January 01, 2014 EDT
Improved Fabrication of Micro Channels in LTCC Circuitry and MEMS Using QPAC® Polyalkylene Carbonate as a Sacrificial Structure
Improved Fabrication of Micro Channels in LTCC Circuitry and MEMS Using QPAC® Polyalkylene Carbonate as a Sacrificial Structure
Ferraro, Peter. 2014. “Improved Fabrication of Micro Channels in LTCC Circuitry and MEMS Using QPAC® Polyalkylene Carbonate as a Sacrificial Structure.” IMAPSource Proceedings 2014 (1): 673–76. https://doi.org/10.4071/isom-WP32.