Vol. 2014, Issue 1, 2014January 01, 2014 EDT
SEM-based X-ray tomography of sub-micrometer defects in 3D integration
SEM-based X-ray tomography of sub-micrometer defects in 3D integration
Laloum, D., C. Ribière, M. Gottardi, T. Mourier, F. Lorut, and P. Bleuet. 2014. “SEM-Based X-Ray Tomography of Sub-Micrometer Defects in 3D Integration.” IMAPSource Proceedings 2014 (1): 641–46. https://doi.org/10.4071/isom-WP22.