High resolution analyzes of resistance behavior in eWLB metal contacts

S. Klengel (Bennemann); M. Krause; L. Berthold; M. Petzold; J. Förster; K. Pressel; T. Meyer

doi:10.4071/isom-2011-TP2-Paper3

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Klengel (Bennemann), S., M. Krause, L. Berthold, M. Petzold, J. Förster, K. Pressel, and T. Meyer. 2011. “High Resolution Analyzes of Resistance Behavior in eWLB Metal Contacts.” IMAPSource Proceedings 2011 (1): 241–48. https://doi.org/10.4071/isom-2011-TP2-Paper3.

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