Vol. 2019, Issue 1, 2019October 01, 2019 EDT
Non-destructive In-line IMC Thickness Measurement Using Acoustic Metrology for 3D Stacking
Non-destructive In-line IMC Thickness Measurement Using Acoustic Metrology for 3D Stacking
Mehendale, M., L. Hou, R. Mair, M. Kotelyanskii, M. Liebens, J. Derakhshandeh, P. Mukundhan, A. Miller, E. Beyne, and T. Kryman. 2019. “Non-Destructive In-Line IMC Thickness Measurement Using Acoustic Metrology for 3D Stacking.” IMAPSource Proceedings 2019 (1): 274–79. https://doi.org/10.4071/2380-4505-2019.1.000274.