Vol. 2015, Issue 1, 2015October 01, 2015 EDT
BCB-Based Dry Film low k Permanent Polymer with sub 4-μm Vias for Advanced WLP and FO-WLP Applications
BCB-Based Dry Film low k Permanent Polymer with sub 4-μm Vias for Advanced WLP and FO-WLP Applications
Toepper, Michael, Tanja Braun, Robert Gernhardt, Martin Wilke, Piotr Mackowiak, Klaus-Dieter Lang, Corey O’Connor, et al. 2015. “BCB-Based Dry Film Low k Permanent Polymer with Sub 4-Μm Vias for Advanced WLP and FO-WLP Applications.” IMAPSource Proceedings 2015 (1): 79–85. https://doi.org/10.4071/isom-2015-TP33.