Vol. 2015, Issue 1, 2015October 01, 2015 EDT
Low Inductance Antenna (LIA) plasma source and plasma-enhanced dual rotatable magnetron sputter assisted with LIA
Low Inductance Antenna (LIA) plasma source and plasma-enhanced dual rotatable magnetron sputter assisted with LIA
Takaya, Y., Y. Tanioka, H. Yoshino, and A. Osawa. 2015. “Low Inductance Antenna (LIA) Plasma Source and Plasma-Enhanced Dual Rotatable Magnetron Sputter Assisted with LIA.” IMAPSource Proceedings 2015 (1): 757–60. https://doi.org/10.4071/isom-2015-Poster9.
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