Loading [Contrib]/a11y/accessibility-menu.js
IMAPSource Conference Papers
Menu
Articles
Ceramics Conference Papers
Device Packaging Conference Presentations
General
High Temperature Conference Papers
IMAPS Chapter Conferences
Symposium Proceedings
All
For Authors
Editorial Board
About
Issues
Journal Micro & Elect Pkg
search
Sorry, something went wrong. Please try your search again.
×
Use advanced search instead (articles only)
Articles
Blog posts
RSS Feed
Enter the URL below into your favorite RSS reader.
https://imapsource.org/feed
×
Symposium Proceedings
Vol. 2015, Issue 1, 2015
October 01, 2015 EDT
Low Inductance Antenna (LIA) plasma source and plasma-enhanced dual rotatable magnetron sputter assisted with LIA
Y. Takaya
,
Y. Tanioka
,
H. Yoshino
,
A. Osawa
,
AlOx
Electric permittivity
ICP
IPD
Plasma
Sputtering
•
https://doi.org/10.4071/isom-2015-Poster9
IMAPSource Conference Papers
Takaya, Y., Y. Tanioka, H. Yoshino, and A. Osawa. 2015. “Low Inductance Antenna (LIA) Plasma Source and Plasma-Enhanced Dual Rotatable Magnetron Sputter Assisted with LIA.”
IMAPSource Proceedings
2015 (1): 757–60.
https://doi.org/10.4071/isom-2015-Poster9
.
Save article as...
▾
PDF
XML
Citation (BibTeX)
View more stats