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ISSN 2380-4505
Symposium Proceedings
Vol. 2012, Issue 1, 2012January 01, 2012 EDT

Electrical Performance of Through-Silicon Vias (TSVs) for High-Frequency 3D IC Integration Applications

Jui-Feng Hung, John H. Lau, Peng-Shu Chen, Shih-Hsien Wu, Sheng-Che Hung, Shinn-Juh Lai, Ming-Lin Li, Shyh-Shyuan Sheu, Zhe-Hui Lin, Chih-Sheng Lin, Wei-Chung Lo, Ming-Jer Kao,
3D IC integrationthrough silicon via (TSV)electrical performancehigh-frequency
https://doi.org/10.4071/isom-2012-THP63
IMAPSource Conference Papers
Hung, Jui-Feng, John H. Lau, Peng-Shu Chen, Shih-Hsien Wu, Sheng-Che Hung, Shinn-Juh Lai, Ming-Lin Li, et al. 2012. “Electrical Performance of Through-Silicon Vias (TSVs) for High-Frequency 3D IC Integration Applications.” IMAPSource Proceedings 2012 (1): 1221–28. https:/​/​doi.org/​10.4071/​isom-2012-THP63.

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