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Symposium Proceedings
Vol. 2015, Issue 1, 2015
October 01, 2015 EDT
A Novel Back-side Via Process For Low-cost TSV.
Toshiyuki Sakuishi
,
Takahide Murayama
,
Yasuhiro Morikawa
,
Via-last
low-cost TSV
Scallop-free
•
https://doi.org/10.4071/isom-2015-THA23
IMAPSource Conference Papers
Sakuishi, Toshiyuki, Takahide Murayama, and Yasuhiro Morikawa. 2015. “A Novel Back-Side Via Process For Low-Cost TSV.”
IMAPSource Proceedings
2015 (1): 577–81.
https://doi.org/10.4071/isom-2015-THA23
.
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