Vol. 2010, Issue 1, 2010January 01, 2010 EDT
Fabrication of Tall Structures for Microelectronics Application Using Selective Electrodeposition Process
Fabrication of Tall Structures for Microelectronics Application Using Selective Electrodeposition Process
Scholz, Bernd, WeiYang Lim, Ferdous Sarwar, Syed Sajid Ahmad, and Aaron Reinholz. 2010. “Fabrication of Tall Structures for Microelectronics Application Using Selective Electrodeposition Process.” IMAPSource Proceedings 2010 (1): 947–53. https://doi.org/10.4071/isom-2010-THA5-Paper7.
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