Vol. 2018, Issue 1, 2018October 01, 2018 EDT
Electrical Characterization of Low Temperature PECVD Oxides for TSV Applications
Electrical Characterization of Low Temperature PECVD Oxides for TSV Applications
Mackowiak, Piotr, Rachid Abdallah, Martin Wilke, Jash Patel, Huma Ashraf, Keith Buchanan, Klaus-Dieter Lang, Martin Schneider-Ramelow, and Ha-Duong Ngo. 2018. “Electrical Characterization of Low Temperature PECVD Oxides for TSV Applications.” IMAPSource Proceedings 2018 (1): 728–33. https://doi.org/10.4071/2380-4505-2018.1.000728.