Electrical Characterization of Low Temperature PECVD Oxides for TSV Applications

Piotr Mackowiak; Rachid Abdallah; Martin Wilke; Jash Patel; Huma Ashraf; Keith Buchanan; Klaus-Dieter Lang; Martin Schneider-Ramelow; Ha-Duong Ngo

doi:10.4071/2380-4505-2018.1.000728

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Mackowiak, Piotr, Rachid Abdallah, Martin Wilke, Jash Patel, Huma Ashraf, Keith Buchanan, Klaus-Dieter Lang, Martin Schneider-Ramelow, and Ha-Duong Ngo. 2018. “Electrical Characterization of Low Temperature PECVD Oxides for TSV Applications.” IMAPSource Proceedings 2018 (1): 728–33. https://doi.org/10.4071/2380-4505-2018.1.000728.

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