Mackowiak, Piotr, Rachid Abdallah, Martin Wilke, Jash Patel, Huma Ashraf, Keith Buchanan, Klaus-Dieter Lang, Martin Schneider-Ramelow, and Ha-Duong Ngo. 2018. “Electrical Characterization of Low Temperature PECVD Oxides for TSV Applications.”
IMAPSource Proceedings 2018 (1): 728–33.
https://doi.org/10.4071/2380-4505-2018.1.000728.