Novel Low Temperature Curable Photosensitive Negative-tone Polyimide with Higher Resolution and Reliability

Daisaku Matsukawa; Hiroko Yotsuyanagi; Shiori Sakakibara; Noriyuki Yamazaki; Tetsuya Enomoto; Takeharu Motobe

doi:10.4071/2380-4505-2018.1.000508

Matsukawa, Daisaku, Hiroko Yotsuyanagi, Shiori Sakakibara, Noriyuki Yamazaki, Tetsuya Enomoto, and Takeharu Motobe. 2018. “Novel Low Temperature Curable Photosensitive Negative-Tone Polyimide with Higher Resolution and Reliability.” IMAPSource Proceedings 2018 (1): 508–11. https://doi.org/10.4071/2380-4505-2018.1.000508.

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