Vol. 2012, Issue 1, 2012January 01, 2012 EDT
Formation of Through-Glass-Via (TGV) by Photo-Chemical Etching with High Selectivity
Formation of Through-Glass-Via (TGV) by Photo-Chemical Etching with High Selectivity
Pei, Zingway, Jui-Po Sun, Hsin-Chen Lai, Pei-Jer Tzeng, Cha-Hsin Lin, Tzu-Kun Ku, and Ming-Jer Kao. 2012. “Formation of Through-Glass-Via (TGV) by Photo-Chemical Etching with High Selectivity.” IMAPSource Proceedings 2012 (1): 785–92. https://doi.org/10.4071/isom-2012-WP15.