High and Moderate-Level Vacuum Packaging of Vibratory MEMS

Igor P. Prikhodko; Brenton R. Simon; Gunjana Sharma; Sergei A. Zotov; Alexander A. Trusov; Andrei M. Shkel

doi:10.4071/isom-2013-WP42

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Prikhodko, Igor P., Brenton R. Simon, Gunjana Sharma, Sergei A. Zotov, Alexander A. Trusov, and Andrei M. Shkel. 2013. “High and Moderate-Level Vacuum Packaging of Vibratory MEMS.” IMAPSource Proceedings 2013 (1): 705–10. https://doi.org/10.4071/isom-2013-WP42.

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