Vol. 2011, Issue 1, 2011January 01, 2011 EDT
Sputter deposition of thin film MIM capacitors on LTCC substrates for RF bypass and filtering applications
Sputter deposition of thin film MIM capacitors on LTCC substrates for RF bypass and filtering applications
Murray, Jack, Wayne Huebner, Matthew J. O’Keefe, Kristina Wilder, Ryan Eatinger, William Kuhn, Daniel S. Krueger, and J. Ambrose Wolf. 2011. “Sputter Deposition of Thin Film MIM Capacitors on LTCC Substrates for RF Bypass and Filtering Applications.” IMAPSource Proceedings 2011 (1): 747–52. https://doi.org/10.4071/isom-2011-WP3-Paper3.