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Symposium Proceedings
Vol. 2015, Issue 1, 2015October 01, 2015 EDT

Advanced lithography and electroplating approach to form high-aspect ratio copper pillars

Keith Best, Roger McCleary, Richard Hollman, Phillip Holmes,
Advanced Packaging2.5D3DTSVHigh Aspect Ratio Cu PillarStepperPanelSi Interposerthick resistdry-film resistsidewall angleThrough Silicon ViaElectro-PlatingECDCu plating
https://doi.org/10.4071/isom-2015-THP23
IMAPSource Conference Papers
Best, Keith, Roger McCleary, Richard Hollman, and Phillip Holmes. 2015. “Advanced Lithography and Electroplating Approach to Form High-Aspect Ratio Copper Pillars.” IMAPSource Proceedings 2015 (1): 793–98. https:/​/​doi.org/​10.4071/​isom-2015-THP23.
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