MEMS Device Sealing in a High Vacuum Atmosphere Achieving Long Term Reliable Vacuum Levels

Paul W. Barnes

doi:10.4071/isom-2010-WP5-paper5

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Barnes, Paul W. 2010. “MEMS Device Sealing in a High Vacuum Atmosphere Achieving Long Term Reliable Vacuum Levels.” IMAPSource Proceedings 2010 (1): 715–19. https://doi.org/10.4071/isom-2010-WP5-paper5.

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