Improving mean time to develop micro-bump/pillar fabrication process for vertical interconnections by combined defectivity and metrology approach

Nicolas Devanciard; Franck Bana; Nicolas Bresson; Stéphane Rey; Carlos Beitia; Dario Alliata; Darcy Hart; John Thornell; Justin Miller

doi:10.4071/isom-2015-WP55

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Devanciard, Nicolas, Franck Bana, Nicolas Bresson, Stéphane Rey, Carlos Beitia, Dario Alliata, Darcy Hart, John Thornell, and Justin Miller. 2015. “Improving Mean Time to Develop Micro-Bump/Pillar Fabrication Process for Vertical Interconnections by Combined Defectivity and Metrology Approach.” IMAPSource Proceedings 2015 (1): 493–98. https://doi.org/10.4071/isom-2015-WP55.

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