Vol. 2011, Issue 1, 2011January 01, 2011 EDT
Packaging Technology of Multi Deflection Arrays for Multi-Shaped Beam Lithography
Packaging Technology of Multi Deflection Arrays for Multi-Shaped Beam Lithography
T. Burkhardt, M. Mohaupt, M. Hornaff, B. Zaage, E. Beckert, H.-J. Döring, M. Slodowski, K. Reimer, M. Witt, R. Eberhardt, A. Tünnermann,
Burkhardt, T., M. Mohaupt, M. Hornaff, B. Zaage, E. Beckert, H.-J. Döring, M. Slodowski, et al. 2011. “Packaging Technology of Multi Deflection Arrays for Multi-Shaped Beam Lithography.” IMAPSource Proceedings 2011 (1): 600–607. https://doi.org/10.4071/isom-2011-WA5-Paper1.