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Symposium Proceedings
Vol. 2015, Issue 1, 2015October 01, 2015 EDT

Large Scale Photodesmear for Via Residue Cleaning in High Density Interconnect substrates

Tomoyuki Habu, Masahito Namai, Akira Aiba, Hajime Kikuiri, Shun Maruyama, Hiroki Horibe, Hiroko Suzuki, Shinichi Endo, Toru Fujinami, Shintaro Yabu, Rahul Jain, Kristof Darmawikarta, Michael Obrien,
DesmearUltra Violet LightPhotodesmear
https://doi.org/10.4071/isom-2015-WP46
IMAPSource Conference Papers
Habu, Tomoyuki, Masahito Namai, Akira Aiba, Hajime Kikuiri, Shun Maruyama, Hiroki Horibe, Hiroko Suzuki, et al. 2015. “Large Scale Photodesmear for Via Residue Cleaning in High Density Interconnect Substrates.” IMAPSource Proceedings 2015 (1): 465–68. https:/​/​doi.org/​10.4071/​isom-2015-WP46.
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