Vacuum Packaging for High-Performance Low Cost MEMS Gyro Used in 6 Degree of Freedom Inertial Navigation System (DOF INS)

D. DeRoo; K. Shcheglov; M. Inbar; D. Smukowski; P. Zappella; P. Barnes

doi:10.4071/isom-2011-WA5-Paper4

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DeRoo, D., K. Shcheglov, M. Inbar, D. Smukowski, P. Zappella, and P. Barnes. 2011. “Vacuum Packaging for High-Performance Low Cost MEMS Gyro Used in 6 Degree of Freedom Inertial Navigation System (DOF INS).” IMAPSource Proceedings 2011 (1): 627–34. https://doi.org/10.4071/isom-2011-WA5-Paper4.

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