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Symposium Proceedings
Vol. 2012, Issue 1, 2012
January 01, 2012 EDT
Planarization of Deep Structures Using Self-Leveling Materials
Dongshun Bai
,
Michelle Fowler
,
Curtis Planje
,
Xie Shao
,
Planarization
self-leveling
deep structures
photosensitive
•
https://doi.org/10.4071/isom-2012-TA32
IMAPSource Conference Papers
Bai, Dongshun, Michelle Fowler, Curtis Planje, and Xie Shao. 2012. “Planarization of Deep Structures Using Self-Leveling Materials.”
IMAPSource Proceedings
2012 (1): 79–83.
https://doi.org/10.4071/isom-2012-TA32
.
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