Vol. 2015, Issue 1, 2015October 01, 2015 EDT
A New In-line Laser-based Acoustic Technique for Pillar Bump Metrology
A New In-line Laser-based Acoustic Technique for Pillar Bump Metrology
Murray, Todd W., Andrew Bakir, David M. Stobbe, Michael J. Kotelyanskii, Robin A. Mair, Manjusha Mehendale, Xueping Ru, et al. 2015. “A New In-Line Laser-Based Acoustic Technique for Pillar Bump Metrology.” IMAPSource Proceedings 2015 (1): 486–92. https://doi.org/10.4071/isom-2015-WP54.