High Resolution Patterning Technology to enable Panel Based Advanced Packaging

Klaus Ruhmer; Philippe Cochet; Roger McCleary; Nelson Chen

doi:10.4071/isom-TA53

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Ruhmer, Klaus, Philippe Cochet, Roger McCleary, and Nelson Chen. 2014. “High Resolution Patterning Technology to Enable Panel Based Advanced Packaging.” IMAPSource Proceedings 2014 (1): 129–36. https://doi.org/10.4071/isom-TA53.

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