Vol. 2019, Issue 1, 2019October 01, 2019 EDT
A Study on Reduced/Absent Adhesion/Cap Layers for Optimized BEOL RC Performance
A Study on Reduced/Absent Adhesion/Cap Layers for Optimized BEOL RC Performance
Dewei Xu, Zhiguo Sun, Haojun Zhang, Scott Pozder, Patrick Justison, Seung-Yeop Kook, Rod Augur, Robert Fox,
Xu, Dewei, Zhiguo Sun, Haojun Zhang, Scott Pozder, Patrick Justison, Seung-Yeop Kook, Rod Augur, and Robert Fox. 2019. “A Study on Reduced/Absent Adhesion/Cap Layers for Optimized BEOL RC Performance.” IMAPSource Proceedings 2019 (1): 591–94. https://doi.org/10.4071/2380-4505-2019.1.000591.