Nanovoid Formation at Cu/Cu/Cu Interconnections of Blind Microvias: A Field Study

T. Bernhard; L. Gregoriades; S. Branagan; L. Stamp; E. Steinhäuser; R. Schulz; F. Brüning

doi:10.4071/2380-4505-2019.1.000492

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Bernhard, T., L. Gregoriades, S. Branagan, L. Stamp, E. Steinhäuser, R. Schulz, and F. Brüning. 2019. “Nanovoid Formation at Cu/Cu/Cu Interconnections of Blind Microvias: A Field Study.” IMAPSource Proceedings 2019 (1): 492–502. https://doi.org/10.4071/2380-4505-2019.1.000492.

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