Vol. 2013, Issue 1, 2013January 01, 2013 EDT
Analysis of stress/strain in Electroless Copper Films
Analysis of stress/strain in Electroless Copper Films
Tobias Bernhard, Simon Bamberg, Frank Brüning, Ralf Brüning, Laurence J. Gregoriades, Tanu Sharma, Delilah Brown, M. Klaus, Ch. Genzel,
Bernhard, Tobias, Simon Bamberg, Frank Brüning, Ralf Brüning, Laurence J. Gregoriades, Tanu Sharma, Delilah Brown, M. Klaus, and Ch. Genzel. 2013. “Analysis of Stress/Strain in Electroless Copper Films.” IMAPSource Proceedings 2013 (1): 26–30. https://doi.org/10.4071/isom-2013-TA17.