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Symposium Proceedings
Vol. 2013, Issue 1, 2013
January 01, 2013 EDT
Improved compensation for a reduction stepper to meet the challenges for advanced packaging applications
James E Webb
,
Steven Gardner
,
Elvino DaSilveira
,
Projection lithography
large imaging field
single telecentric
large magnification adjustment
improved overlay and matching
•
https://doi.org/10.4071/isom-2013-THP16
IMAPSource Conference Papers
Webb, James E, Steven Gardner, and Elvino DaSilveira. 2013. “Improved Compensation for a Reduction Stepper to Meet the Challenges for Advanced Packaging Applications.”
IMAPSource Proceedings
2013 (1): 814–19.
https://doi.org/10.4071/isom-2013-THP16
.
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