ISSN 2380-4505
Vol. 2013, Issue 1, 2013January 01, 2013 EDT
Low temperature Si-Si, SiO2-SiO2 covalent bonding structures with thin siloxane layer
Low temperature Si-Si, SiO2-SiO2 covalent bonding structures with thin siloxane layer
Lee, Jeongyub, Kunmo Chu, Yongyoung Park, Wooyoung Yang, Wenxu Xianyu, and Changyoul Moon. 2013. “Low Temperature Si-Si, SiO2-SiO2 Covalent Bonding Structures with Thin Siloxane Layer.” IMAPSource Proceedings 2013 (1): 424–28. https://doi.org/10.4071/isom-2013-TP67.