Low temperature Si-Si, SiO2-SiO2 covalent bonding structures with thin siloxane layer

Jeongyub Lee; Kunmo Chu; Yongyoung Park; Wooyoung Yang; Wenxu Xianyu; Changyoul Moon

doi:10.4071/isom-2013-TP67

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Lee, Jeongyub, Kunmo Chu, Yongyoung Park, Wooyoung Yang, Wenxu Xianyu, and Changyoul Moon. 2013. “Low Temperature Si-Si, SiO2-SiO2 Covalent Bonding Structures with Thin Siloxane Layer.” IMAPSource Proceedings 2013 (1): 424–28. https://doi.org/10.4071/isom-2013-TP67.

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