Wang, Zidong, Michael Gallagher, Kevin Wang, Elissei Iagodkine, Mark Oliver, Joe Lachowski, Greg Prokopowicz, et al. 2013. “Development of Laser and Photodefinable Toughened Benzocyclobutene Dielectric Materials for 3D-TSV Integration.”
IMAPSource Proceedings 2013 (1): 67–71.
https://doi.org/10.4071/isom-2013-TA31.