New Photosensitive Dielectric Material for High-Density RDL with Ultra-Small Photo-Vias and High Reliability

Daichi Okamoto; Yoko Shibasaki; Daisuke Shibata; Tadahiko Hanada

doi:10.4071/2380-4505-2018.1.000466

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Okamoto, Daichi, Yoko Shibasaki, Daisuke Shibata, and Tadahiko Hanada. 2018. “New Photosensitive Dielectric Material for High-Density RDL with Ultra-Small Photo-Vias and High Reliability.” IMAPSource Proceedings 2018 (1): 466–69. https://doi.org/10.4071/2380-4505-2018.1.000466.

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