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Symposium Proceedings
Vol. 2017, Issue 1, 2017
October 01, 2017 EDT
Separating Temporary Carrier from Large Thin Panel with Air Jetting
Hao Tang
,
My Nguyen
,
Ming Yin
,
Air Debond
Carrier Lift-Off
Low Stress Debonding
Temporary Bonding
Thin Substrate Assembly
•
https://doi.org/10.4071/isom-2017-TP46_108
IMAPSource Conference Papers
Tang, Hao, My Nguyen, and Ming Yin. 2017. “Separating Temporary Carrier from Large Thin Panel with Air Jetting.”
IMAPSource Proceedings
2017 (1): 126–29.
https://doi.org/10.4071/isom-2017-TP46_108
.
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