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Symposium Proceedings
Vol. 2017, Issue 1, 2017October 01, 2017 EDT

Using a Metal Oxide Adhesion Layer and Wet Chemical Cu Metallization for Fine Line Pattern Formation on Glass

Michael Merschky, Fabian Michalik, Martin Thoms, Robin Taylor, Diego Reinoso-Cocina, Stephan Hotz, Patrick Brooks,
Adhesion LayerDifferential EtchingGlassMetal OxideWet Chemical Metallization
https://doi.org/10.4071/isom-2017-WP51_084
IMAPSource Conference Papers
Merschky, Michael, Fabian Michalik, Martin Thoms, Robin Taylor, Diego Reinoso-Cocina, Stephan Hotz, and Patrick Brooks. 2017. “Using a Metal Oxide Adhesion Layer and Wet Chemical Cu Metallization for Fine Line Pattern Formation on Glass.” IMAPSource Proceedings 2017 (1): 458–63. https:/​/​doi.org/​10.4071/​isom-2017-WP51_084.
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