Fine Line Routing and Micro via Patterning in ABF Enabled by Excimer Laser Ablation

Habib Hichri; Shohei Fujishima; Seongkuk Lee; Markus Arendt; Shigeo Nakamura

doi:10.4071/isom-2017-TP44_011

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Hichri, Habib, Shohei Fujishima, Seongkuk Lee, Markus Arendt, and Shigeo Nakamura. 2017. “Fine Line Routing and Micro via Patterning in ABF Enabled by Excimer Laser Ablation.” IMAPSource Proceedings 2017 (1): 113–19. https://doi.org/10.4071/isom-2017-TP44_011.

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