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ISSN 2380-4505
High Temperature Conference Papers
Vol. 2024, Issue HiTEN, 2024January 27, 2026 EDT

Investigation of Ohmic Contacts and Resistances of a 4H-SiC CMOS Technology up to 550°C

Mathias Rommel, Alexander May, Leander Baier, Julian Kauth, Norman Böttcher, Michael Jank,
4H-SiCCMOSTemperature dependenceOhmic resistanceSheet resistanceSpecific contact resistance
https://doi.org/10.4071/001c.155879
IMAPSource Conference Papers
Rommel, Mathias, Alexander May, Leander Baier, Julian Kauth, Norman Böttcher, and Michael Jank. 2026. “Investigation of Ohmic Contacts and Resistances of a 4H-SiC CMOS Technology up to 550°C.” IMAPSource Proceedings 2024 (HiTEN): 13–18. https:/​/​doi.org/​10.4071/​001c.155879.

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