Hybrid Bonding Based on Polyimide for Low Temperature Process

Hitoshi Araki; Masaya Jukei; Kota Nomura; Yugo Tanigaki; Takenori Fujiwara; Yu Shoji

doi:10.4071/001c.153872

Araki, Hitoshi, Masaya Jukei, Kota Nomura, Yugo Tanigaki, Takenori Fujiwara, and Yu Shoji. 2025. “Hybrid Bonding Based on Polyimide for Low Temperature Process.” IMAPSource Proceedings 2025 (DPC): 859–88. https://doi.org/10.4071/001c.153872.

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