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ISSN 2380-4505
Symposium Proceedings
Vol. 2025, Issue Symposium, 2025November 10, 2025 EDT

Innovative Digital Patterning by LITHOSCALE® XT for UHD FO WLP and HD PLP Required in 3D Integration

Ksenija Varga, Roman Holly, Tobias Zenger, Boris Považay, Matthias Brunnbauer,
FO PLPdigital lithographyRDL/via patterninghigh resolution dielectric PI
https://doi.org/10.4071/001c.147222
IMAPSource Conference Papers
Varga, Ksenija, Roman Holly, Tobias Zenger, Boris Považay, and Matthias Brunnbauer. 2025. “Innovative Digital Patterning by LITHOSCALE® XT for UHD FO WLP and HD PLP Required in 3D Integration.” IMAPSource Proceedings 2025 (Symposium): 275–79. https:/​/​doi.org/​10.4071/​001c.147222.

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