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ISSN 2380-4505
Symposium Proceedings
Vol. 2025, Issue Symposium, 2025November 10, 2025 EDT

Pulse Reverse Electroplating for Copper Filling in High Aspect Ratio Through Glass Vias for Advanced Packaging

Dennis Fiedler, Grigory Vazhenin, Holger Schulz, Henning Hübner, Tobias Sponholz, Mustafa Oezkoek, HeeBum Shin,
Advanced PackagingCopper FillingHigh Aspect RatioPulse Reverse PlatingThrough Glass Via
https://doi.org/10.4071/001c.147205
IMAPSource Conference Papers
Fiedler, Dennis, Grigory Vazhenin, Holger Schulz, Henning Hübner, Tobias Sponholz, Mustafa Oezkoek, and HeeBum Shin. 2025. “Pulse Reverse Electroplating for Copper Filling in High Aspect Ratio Through Glass Vias for Advanced Packaging.” IMAPSource Proceedings 2025 (Symposium): 230–34. https:/​/​doi.org/​10.4071/​001c.147205.

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