ISSN 2380-4505
Vol. 2025, Issue Symposium, 2025November 10, 2025 EDT
BEOL Film Crack Mechanical Reliability Mitigation
BEOL Film Crack Mechanical Reliability Mitigation
Yutaka Suzuki, Jaimal Williamson, Tom Kronenberg, Francis Oyebanjo, Madison Monzingo, Usman Chaudhry, Rajen Murugan,
Suzuki, Yutaka, Jaimal Williamson, Tom Kronenberg, Francis Oyebanjo, Madison Monzingo, Usman Chaudhry, and Rajen Murugan. 2025. “BEOL Film Crack Mechanical Reliability Mitigation.” IMAPSource Proceedings 2025 (Symposium): 149–56. https://doi.org/10.4071/001c.147191.