ISSN 2380-4505
Vol. 2025, Issue Symposium, 2025November 10, 2025 EDT
Modeling Analysis of Passivation and TEOS Cracking in BEOL Metal Trace Design
Modeling Analysis of Passivation and TEOS Cracking in BEOL Metal Trace Design
Wang, Wei, Karthik Dhandapani, and Yangyang Sun. 2025. “Modeling Analysis of Passivation and TEOS Cracking in BEOL Metal Trace Design.” IMAPSource Proceedings 2025 (Symposium): 143–48. https://doi.org/10.4071/001c.147189.