Materials and Process Study for Polymer Hybrid Bonding

Masaya Jukei; Kota Nomura; Yugo Tanigaki; Takenori Fujiwara; Hitoshi Araki; Tomoyuki Honda; Yu Shoji

doi:10.4071/001c.129737

Jukei, Masaya, Kota Nomura, Yugo Tanigaki, Takenori Fujiwara, Hitoshi Araki, Tomoyuki Honda, and Yu Shoji. 2025. “Materials and Process Study for Polymer Hybrid Bonding.” IMAPSource Proceedings 2024 (Symposium): 67–72. https://doi.org/10.4071/001c.129737.

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